| 摘要 |
PROBLEM TO BE SOLVED: To provide a table device and instrument for coordinate measurement that can measure transmitted light and can also improve xy transition accuracy. SOLUTION: The table device for coordinate measurement has (A) a base member (2) having a guide element (3), (B) an intermediate member (4) which is positioned above the member (2), slides along the element (3), and is firmly coupled with a guide element (6) and, at the same time, on which a first drive element (9) is arranged, and (C) a table (5) which is positioned above the member (4) and slides along the element (6) and on which a second drive element (11) is arranged. (a) The intermediate member (4) is positioned above the base member (2) in a free overhead state and both ends of the member (4) are respectively supported by the guide element (6) and an additional support element (13). (b) The guide element (6), support element (13), and table (5) are independently slidably supported with respect to the surface of the base member (2). In addition, (c) the base member (2), intermediate member (4), and table (5) have internal openings (18) for transmitted light areas and (d) the drive elements (9) and (11) are fixed in position with respect to the base member (2). COPYRIGHT: (C)2003,JPO
|
