| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To carry out an origin positioning of the main shaft of a non-reaction stage without using an absolute position sensor or a commutation sensor. <P>SOLUTION: A stage and a moving magnet linear motor are individually arranged on a plane guide. A second linear motor group for positioning servo for the linear motor is shaken. An abutting surface and an abutting piece for the origin positioning of an X-axis and aθ-axis are provided. An approximate position in the direction of the main shaft of the stage is derived by calculation based on an operating amount of the second linear motor, and after setting a laser interferometer, a commutation is carried out by a value of the laser interferometer and a movement in the direction to the origin is made. <P>COPYRIGHT: (C)2003,JPO</p> |
