THIN-FILM PIEZOELECTRIC ELEMENT AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a thin-film piezoelectric element which has a small leak current between electrode metal films and its manufacturing method.

SOLUTION: The thin-film piezoelectric element has a thin-film piezoelectric body having 1st and 2nd surfaces facing each other and at least one unit laminated body composed of a 1st electrode metal film on its 1st surface and a 2nd electrode metal film on its 2nd surface, and is provided with an electrode separation surface formed of a thin-film piezoelectric body surface parallel to the 1st surface between the 1st and 2nd electrode metal films.

COPYRIGHT: (C)2003,JPO