| 摘要 |
PROBLEM TO BE SOLVED: To maintain telecentric illumination in a numerical aperture by altering the size of an illumination area without (i.e., increasing irradiation area) the loss of energy upon the size of the illumination area being altered. SOLUTION: The invention relates to an illumination system comprising an illumination light source, a beam conditioner disposed on an optical path together with the illumination light source, a first diffraction array, a condenser system, and a second diffraction array. The illumination light source serves to direct light to the first diffraction array through the beam conditioner. The light is then directed to the condenser system disposed on the optical path extending between the first diffraction array and the second diffraction array. The condenser system includes a plurality of fixed optical components and a plurality of movable optical components. The plurality of the movable optical components are disposed on the optical path together with the plurality of the fixed optical components. COPYRIGHT: (C)2003,JPO
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