| 摘要 |
PROBLEM TO BE SOLVED: To uniformly observe a scanned region by preventing the generation of a sparse spot at a measurement point in the scanned region. SOLUTION: The device is provided with a laser diode 7 which emits a laser light, a scanner 6 with which a two-dimensional scanning is performed by using a laser light emitted from the laser diode 7 and vertically and horizontally oscillating the laser light, a photodiode 8 which receives a reflected signal of the laser light emitted via the scanner 6, and a controller 4e which controls the vertically oscillating signal and the horizontally oscillating signal of the scanner 6. A uniform measured result of observation points in the two-dimensional scanning regions is available with the controller 4e by modulating the amplitude of the vertically oscillating signal or the horizontally oscillating signal by using a function of which the scanning observation time is at least a half period. COPYRIGHT: (C)2003,JPO
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