| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device capable of coping with the inspection of a large-size liquid crystal panel. SOLUTION: Array sensors 20 equipped respectively with an FET potential sensors 24 are staggered in two rows. Consequently, the pitch of TET potential sensors 24 on both ends of adjacent array sensors 20 can be set as L, thereby, able to cope with the inspection of the large-size liquid crystal panel. COPYRIGHT: (C)2003,JPO
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