| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a surface acoustic wave (SAW) resonator and a manufacturing method of an SAW device capable of partially adjusting the frequency, and being adjusted, while measuring the frequency or immediate switching between frequency measurement and adjustment, and of adjusting the frequency over a wide range. SOLUTION: An SAW element 13 having an IDT (interdigital transducer) 11a made of Ta on a piezoelectric substrate 10a made of a crystal is irradiated with an ion beam 17 from an ion gun 16a. In this way, ions are made to collide physically with the IDT 11a and the substrate 10a, to etch the IDT 11a and the substrate 10a. COPYRIGHT: (C)2003,JPO
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