| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method which can form a magnetic detecting element having its magnetic detecting capability improved by reducing damage to a free magnetic layer as a magnetic detecting element which supplies a longitudinal bias magnetic field to a free magnetic layer with an exchange bias. SOLUTION: After a nonmagnetic layer 31 is formed of a noble metal on the free magnetic layer 28, part of the nonmagnetic layer is removed by low- energy ion milling. The low-energy ion milling is low in milling rate and can make the margin of a milling stop position narrow. Specially, the milling can be stopped the moment the nonmagnetic layer 31 is removed by the ion milling. The free magnetic layer 28 is not damaged greatly by the ion milling. COPYRIGHT: (C)2003,JPO
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