| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic sensor which can be formed in one chip and made small in size and eliminates the need for a protection film for guaranteeing a magnetic shield layer. SOLUTION: The magnetic sensor is equipped with a giant magnetoresistance element (GMR element) 12, 13 and a reference resistance 14, 15 in structure wherein nonmagnetic layers 21a and 21b and ferromagnetic layers 22a and 22b are laminated by turns on a substrate 11. The layer thickness of each of the nonmagnetic layers 21b and ferromagnetic layers 22b of the reference resistance 14, 15 is made less than the resistance variation rate of each of the nonmagnetic layers 21a and ferromagnetic layers 22a of the GMR element 12, 13 and the number of the laminated nonmagnetic layers 21b and ferromagnetic layers 22b of the reference resistance 14, 15 is made less than that of the laminated nonmagnetic layers 21a and ferromagnetic layers 22a of the GMR element 12, 13. The resistance value of the reference resistance 14, 15 is made equal to that of the GMR element 12, 13. COPYRIGHT: (C)2003,JPO
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