| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection unit and an inspection method for a semiconductor device, which is capable of locating a defective region occurring, in the semiconductor device of a certain type which is kept in an activated state for a certain time and then turned to a non-activated state, after a certain time elapses. SOLUTION: This inspection unit 10 provided for a semiconductor device is equipped with at least a test signal generator 3 which periodically generates test signals of the same pattern a few times so as to apply them to a sample 1 as an object of measurement, a light beam generator 5 which irradiates an optional spot with a light beam for a certain time, a current measuring unit 6 which measures an operating current flowing through each spot on the specimen 1 for a certain time, and a timing processing unit 8 which controls the operation timing of the test signal generator 3 and also the operation timing of the light beam generator 5 and the current measuring unit 6 through the intermediary of a control unit 7. COPYRIGHT: (C)2003,JPO
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