LASER APPARATUS AND LASER RADIATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a laser apparatus for continuous oscillation to enhance the processing efficiency and also to provide a method of manufacturing a semiconductor device using the same laser apparatus. SOLUTION: The laser apparatus comprises a laser oscillating device, a means for rotating an processing object, a means for moving the processing object toward the center of rotation and moreover toward the external side from the center, and an optical system to process the laser beam emitted from the laser oscillating device to radiate the constant area within the moving range of the processing object with the processed laser beam. This laser apparatus is characterized in that the overlapping area of the constant area and the processing object can be moved by moving the processing object, while it is rotated toward the center of rotation or toward the external side from the center. COPYRIGHT: (C)2003,JPO