发明名称 |
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
PURPOSE: A semiconductor device and a method for manufacturing the same are provided to be capable of previously restraining the generation of step difference due to the structure of a gate pattern by stably burying a trench type gate pattern in a silicon substrate. CONSTITUTION: A trench type gate pattern(12) is buried in a substrate(11). The bottom portion and both sides of the trench type gate pattern(12) are enclosed by a gate oxide layer(13). A source and drain diffusing layer(15,16) are located and spaced apart from both sides of the trench type gate pattern(12) in the substrate(11). A plurality of isolation layers(17) are located and spaced apart from the source and drain diffusing layer(15,16), respectively.
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申请公布号 |
KR20030052823(A) |
申请公布日期 |
2003.06.27 |
申请号 |
KR20010082922 |
申请日期 |
2001.12.21 |
申请人 |
DONGBU ELECTRONICS CO., LTD. |
发明人 |
JUNG, GI TAEK |
分类号 |
H01L21/76;(IPC1-7):H01L21/76 |
主分类号 |
H01L21/76 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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