AUTOMATIC PATTERN SURFACE EXTRACTION METHOD AND SHAPE MEASURING DEVICE THEREOF

摘要

PROBLEM TO BE SOLVED: To accurately extract a pattern surface even in the case that reflection light quantity is reduced in a measurement using light due to roughness having directivity on an electronic substrate surface when the surface is ground for improving contactness of solder by smoothing and activating the surface in producing the electronic substrate.

SOLUTION: A differential image is produced by using a plurality of brilliance images obtained by measuring from a plurality of different directions, a binary threshold is automatically determined by histogram processing and the differential threshold is binarized so that only patterned surface is automatically accurately extracted in the constitution.

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