COLOR FILTER PROCESS FOR BOTTOM ANTIREFLECTION COATING FOR MANUFACTURING SOLID-STATE IMAGE SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a new image sensor system and to provide a method of manufacturing the system.

SOLUTION: The image sensor system (10) comprises a color filter array (14) formed by the color filter process used to incorporate a bottom antireflection coating (16). The coating (16) becomes a protective layer used to protect an exposure region in an active image sensing element structure (12) while the array (14) is being formed, and the intrinsic transmission characteristic of the structure (12) is maintained. The coating (16) reduces the deterioration of a metal structure (e.g. a bonding pad) existing on the exposure face of the structure (12) or the edge of a pixel. The coating (16) provides a sure bonding surface to the array (14), and its substantially excludes the deterioration of a resist structure in the array (14). The coating (16) improves the light transmission characteristic of one or more colors in the array (14).

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