| 摘要 |
PROBLEM TO BE SOLVED: To provide a multi-chamber processing apparatus having flexibility in design. SOLUTION: This multi-chamber processing apparatus can be constituted in a free layout, by selecting arbitrary types and numbers of units from among processing units U1, transfer units U2, intermediate units U3, and entrance and exit units U4 and connecting the selected transfer units U3 to each other through a selected intermediate unit U3. The throughput of this processing apparatus can be improved, when a transfer means, an inspection device, a thermo-regulator, an alignment device, etc., are set up in an intermediate chamber, because the apparatus can perform various kinds of processings during transfer. In addition, since each chamber has an independent exhaust system, the loads imposed upon the exhaust system do not increase even when the number of combined treatment units increases. COPYRIGHT: (C)2003,JPO |
