| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric actuator having an optimum layer constitution when using (110)-aligned ruthenium acid strontium as a lower electrode. SOLUTION: The piezoelectric actuator is equipped with a diaphragm formed of (100)-aligned yttria-stabilized zirconia, CeO<SB>2</SB>, or ZrO<SB>2</SB>formed on a (100)-aligned Si substrate 20 on an epitaxial basis, the lower electrode 42 having (110)-aligned ruthenium acid strontium with a perovskite structure, a piezoelectric body layer 43 which is formed on the lower electrode and formed of (110)-aligned PZT, and an upper electrode 44 which is formed on the piezoelectric body layer. COPYRIGHT: (C)2003,JPO
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