发明名称 APPARATUS AND METHOD FOR MANUFACTURING ELECTRONIC COMPONENT
摘要 PROBLEM TO BE SOLVED: To increase the reliability, to reduce a manufacturing cost, and to increase the productivity of an electronic component. SOLUTION: While a pressing load is controlled by a control section 13, with solder bumps 4 being heated by a heat table 6, a distance detection member 11 detects the maximum elevated position of a mounting nozzle 5 where the mounting nozzle 5 is most separated from the turn table 6. When the mounting nozzle 5 is drawn near to the turn table 6 by a bump depressing distance from the maximum elevated position, the control section 13 stops the movement of the mounting nozzle 5. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003179100(A) 申请公布日期 2003.06.27
申请号 JP20020293798 申请日期 2002.10.07
申请人 NEC CORP 发明人 HANAWA YASUHIRO
分类号 H01L21/60;(IPC1-7):H01L21/60 主分类号 H01L21/60
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