| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method, device and program for accurately and swiftly evaluating a pattern. <P>SOLUTION: A pattern contour model MT composed of picture element rows with specified contour point positions EP and respectively stored with a relative gray-level value is generated by using the pattern evaluation device 2 provided with an image processing device 20. Image data of an evaluation pattern is acquired, an image matching process is executed on a measurement object image by using the pattern contour model MT as a reference image, and coordinates of contour points of the evaluation pattern are detected. <P>COPYRIGHT: (C)2003,JPO |
