SUBSTRATE-DETECTING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a high-accuracy substrate-detecting device that has a simple device constitution and can accurately detect the housed states of substrates in a FOUP cassette.

SOLUTION: This substrate detecting device 1 detects the substrates W housed in the cassette 11 provided with an opening 11c for carrying the substrates W in and out of the cassette 11 and a plurality of stages of grooves 11d for horizontally housing and holding the substrates W. This detection device 1 has a receiver 52 which is firmly fixed to a member 59 facing the opening 11c and composed of receiving elements serially arranged in the height direction of the cassette 11 and a transmitter 52 which is set up movably in the vertical direction of the cassette 11 and transmits signals to the substrates W housed in the grooves 11d of the cassette 11. This detection device 1 detects the presence/absence and the states of substrates W housed in the grooves 11d of the cassette 11 by receiving the signals transmitted from the transmitter 52 by means of the receiver 52.

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