| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermal treatment device which is capable of heating a substrate in a concentric manner or a gradient manner, in which the distribution of temperature in the substrate is concentric or gradient in a certain direction as it is optionally changing the temperature of the substrate. SOLUTION: This thermal treatment device thermally treating an angular substrate is composed of a lower hot plate equipped with a temperature control means, a spacing body which is low in thermal conductivity and arranged along the periphery of the lower hot plate, four or more side hot plates which are thermally isolated from each other, and four or more temperature control means which heat up the above side hot plates. COPYRIGHT: (C)2003,JPO
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