| 摘要 |
PROBLEM TO BE SOLVED: To secure stability and response of temperature control and make it easy to avoid damage to a heater or breaking of wire. SOLUTION: A subtraction part 5 outputs deviation between a targeted temperature SV and a measurement temperature PV from a controlled object. An arithmetic part 7 calculates an operation volume MV from the deviation. A correction part 11 performs a heating control of a heater 9 of the controlled object 1 based on the operation volume MV, and at the same time, outputs against the operation volume a corrected operation volume MV1 corrected with a correction function K (t) of characteristics same as or similar to temperature characteristics function of the heater 9 according to the measured temperature to perform temperature control of the heater 9. COPYRIGHT: (C)2003,JPO
|
