发明名称 AUTOMATIC MULTI-CHANNEL ETCHING SYSTEM
摘要 The invention relates to a device and a method for etching precision surfaces. In order to facilitate the development of products and of production processes, the inventive etching device/method consists of/involves a reaction chamber for receiving and treating individual objects.
申请公布号 WO03052796(A2) 申请公布日期 2003.06.26
申请号 WO2002EP14144 申请日期 2002.12.12
申请人 COENEN, WOLFGANG 发明人 COENEN, WOLFGANG
分类号 H01L21/00 主分类号 H01L21/00
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