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发明名称
Brausekopf
摘要
申请公布号
DE19826590(C2)
申请公布日期
2003.06.26
申请号
DE19981026590
申请日期
1998.06.15
申请人
TRIKON EQUIPMENTS LTD., NEWPORT
发明人
CARTER, STEPHEN
分类号
B05B1/14;C23C16/44;C23C16/455;C23C16/50;C23F4/00;H01J37/32;(IPC1-7):C23C16/44;B01J19/00
主分类号
B05B1/14
代理机构
代理人
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地址
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