发明名称 ABRASIVE ARTICLE FOR THE DEPOSITION AND POLISHING OF A CONDUCTIVE MATERIAL
摘要 <p>An abrasive article (12) is described. The article (12) is suitable for the deposition and mechanical polishing of a conductive material, and comprises: a polishing layer having a textured surface (102) comprising a binder and a second surface opposite the textured surface (102), the polishing layer further comprising a first channel (104) extending therethrough; a backing (118) having a first backing surface and a second backing surface, the first backing surface associated with the second surface of the polishing layer, the backing (118) comprising a second channel (140, 148) coextensive with the first channel (104) and extending through the backing from the first backing surface to the second backing surface; the first channel (104) and the second channel (140, 148) dimensioned with respect to one another so that the textured surface (102) of the polishing layer is outside of a line of sight (a).</p>
申请公布号 WO2003051577(A1) 申请公布日期 2003.06.26
申请号 US2002032864 申请日期 2002.10.15
申请人 发明人
分类号 主分类号
代理机构 代理人
主权项
地址