发明名称 Semiconductor device and fabricating method thereof
摘要 A semiconductor device and method for fabricating the same. The semiconductor device comprises a capacitor including a semiconductor substrate having a first conductive type well; a first trench formed in the semiconductor substrate; a plate electrode formed on the first trench; a capacitor insulating film formed on the plate electrode; and a storage node electrode formed in the first trench. The transistor includes a first insulating film for planarization formed on the storage node electrode; a second trench formed in the portion of the first conductive type well, which does not correspond to the first trench; a gate insulating film formed on the second trench; a gate electrode formed on the portion of the gate insulating film, located on the second trench; and drain and source regions formed on the upper and lower portions of the first conductive type well, respectively, which corresponds to the sidewall of the second trench.
申请公布号 US2003116797(A1) 申请公布日期 2003.06.26
申请号 US20020325381 申请日期 2002.12.20
申请人 PARK CHEOL SOO 发明人 PARK CHEOL SOO
分类号 H01L21/334;H01L21/8242;H01L27/108;H01L29/94;(IPC1-7):H01L27/108 主分类号 H01L21/334
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