发明名称 INTEGRATED CIRCUIT OPTICAL WAVEGUIDE AND ITS MANUFACTURING METHOD
摘要 <p>A method for forming an optical waveguide includes depositing a cladding material on a first substrate, forming a trench in the cladding material on the first substrate, and filling the trench with a optically conductive core material. The upper surface of the cladding material and the optically conductive core material are then planarized to produce a substantially planar surface. The method further includes depositing a cladding material on a second substrate, forming a mirror image trench into the cladding material on the second substrate, and filling the mirror image trench with the optically conductive core material. The upper surface of the second cladding layer and the core material therein is then planarized. Thereafter, the first substrate is affixed to the second substrate such that the trench and the mirror image trench are in abutment and form a substantially circular optical core.</p>
申请公布号 WO2003052472(A2) 申请公布日期 2003.06.26
申请号 US2002038694 申请日期 2002.12.03
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