发明名称 METHOD AND APPARATUS FOR TREATING WASTE OZONE WATER AND APPARATUS FOR TREATMENT WITH OZONE
摘要 A method for treating a waste ozone water which comprises introducing a waste ozone water (41) to a reaction vessel (31), and irradiating the ozone water with an ultraviolet ray flux containing a ray having a wavelength of 254 nm in a high proportion with an ultraviolet lamp (34), followed by discharging the water. Although the waste ozone water (41) usually contains, in addition to the ozone dissolved at a high concentration, a large amount of organic materials such as a substance for suppressing the decomposition of ozone and a substance being generated in association with the liquid phase treatment with ozone, the above ultraviolet rays are not practically consumed for the decomposition of the organic materials, but are efficiently used for the decomposition of dissolved ozone. The employment of the method allows an efficient liquid phase treatment with ozone by using an ozone water of an enhanced ozone concentration, through preventing the problems of the corrosion of pipes and the environmental pollution due to the discharge of a waste ozone water in the case wherein a highly concentrated ozone water is used for a liquid phase treatment with ozone.
申请公布号 WO03051777(A1) 申请公布日期 2003.06.26
申请号 WO2001JP11065 申请日期 2001.12.17
申请人 SUMITOMO PRECISION PRODUCTS CO., LTD;NAKATSUKA, SUGERU;YAMANO, KUNIKO 发明人 NAKATSUKA, SUGERU;YAMANO, KUNIKO
分类号 G03F7/42;C02F1/32;C02F1/78;H01L21/027;(IPC1-7):C02F1/32 主分类号 G03F7/42
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