发明名称 Method of forming one or more nanopores for aligning molecules for molecular electronics
摘要 A technique is provided for forming a molecule or an array of molecules having a defined orientation relative to the substrate or for forming a mold for deposition of a material therein. The array of molecules is formed by dispersing them in an array of small, aligned holes (nanopores), or mold, in a substrate. Typically, the material in which the nanopores are formed is insulating. The underlying substrate may be either conducting or insulating. For electronic device applications, the substrate is, in general, electrically conducting and may be exposed at the bottom of the pores so that one end of the molecule in the nanopore makes electrical contact to the substrate. A substrate such as a single-crystal silicon wafer is especially convenient because many of the process steps to form the molecular array can use techniques well developed for semiconductor device and integrated-circuit fabrication.
申请公布号 US2003116531(A1) 申请公布日期 2003.06.26
申请号 US20010029583 申请日期 2001.12.20
申请人 KAMINS THEODORE I.;CHEN YONG;BECK PATRICIA A. 发明人 KAMINS THEODORE I.;CHEN YONG;BECK PATRICIA A.
分类号 H01L29/06;C03C15/00;C03C17/00;H01L21/033;H01L21/311;(IPC1-7):C03C15/00;C03C25/68 主分类号 H01L29/06
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