发明名称 |
Sensor for a contact-free temperature measurement |
摘要 |
A sensor for measuring a temperature by means of a heat-sensitive area applied onto and/or underneath a membrane, the membrane being arranged above a recess. The recess is etched by a reactive ion etching method such that it is fully defined laterally by side walls arranged at an angle between 80° and 100° relative to the membrane, adjoining side walls being arranged at an angle of at least 40° relative to one another.
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申请公布号 |
US2003118076(A1) |
申请公布日期 |
2003.06.26 |
申请号 |
US20020238546 |
申请日期 |
2002.09.10 |
申请人 |
PERKINELMER OPTOELECTRONICS GMBH |
发明人 |
SCHIEFERDECKER JORG;HAUSNER MARTIN;LENEKE WILHELM;SIMON MARION |
分类号 |
G01J1/02;G01J5/02;G01J5/10;G01J5/12;G01J5/14;G01J5/20;H01L35/14;H01L35/22;H01L35/32;H01L35/34;H01L37/02;(IPC1-7):G01J5/00 |
主分类号 |
G01J1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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