发明名称 PATTERNING OF SOLID STATE FEATURES BY DIRECT WRITE NANOLITHOGRAPHIC PRINTING
摘要 <p>The present invention includes a method of fabricating organic/inorganic composite nanostructures on a substrate comprising depositing a solution having a block copolymer and an inorganic precursor on the substrate using dip pen nanolithography. The nanostructures comprises arrays of lines and/or dots having widths/diameters less than 1 micron. The present invention also includes a device comprising an organic/inorganic composite nanoscale region, wherein the nanoscale region has a nanometer scale dimension other than height.</p>
申请公布号 WO2003052514(A2) 申请公布日期 2003.06.26
申请号 US2002040118 申请日期 2002.12.17
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