发明名称 METHOD OF DIVIDING A SUBSTRATE INTO A PLURALITY OF INDIVIDUAL CHIP PARTS
摘要 <p>The present invention relates to a method for dividing a substrate into a number of individual chip parts, comprising the steps of: forming a number of chip parts in the substrate, comprising, for each chip part, of arranging recesses in the substrate for containing fluid; arranging one or more breaking grooves in the substrate along individual chip parts; applying mechanical force to the substrate to break the substrate along the breaking grooves. The invention also relates to a substrate as well as a chip part.</p>
申请公布号 WO2003051765(A2) 申请公布日期 2003.06.26
申请号 NL2002000850 申请日期 2002.12.19
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