| 摘要 |
<p>The present invention relates to a method of determining the cleanness of a surface comprising the steps of treating the surface with a solvent comprising a reactive component, so as to cause the reactive component to react with contaminants, if any, being present on the surface, measuring the concentration of the reactive component after having reacted with any contaminants and determining the cleanness by comparing the measured concentration with a preselected concentration of a reactive component in the solvent. The present invention further relates to a use of the method for determining the cleanness of a surface in any apparatus.</p> |
