发明名称 |
Vacuum oven used in clean room, has vacuum valve which releasably couples hollow oven casing to external vacuum source and door which covers opening of oven casing |
摘要 |
The hollow oven casing (12) accessible through an opening (20), accommodates multiple removable shelves (22) coupled to a heating pad (30). A power interface (32) provided at the end of heating pad, connects the heating pad to an external power source. A vacuum valve (74) releasably couples the oven casing to an external vacuum source and a door (18) covers the opening of hollow casing. Independent claims are also included for the following: (1) method for decontaminating items; and (2) method for operating multiple vacuum ovens.
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申请公布号 |
DE10248506(A1) |
申请公布日期 |
2003.06.26 |
申请号 |
DE20021048506 |
申请日期 |
2002.10.11 |
申请人 |
WEMS, INC. |
发明人 |
VERNIK, DMITRY;DREIKE, CHRISTOPHER B.;WOLFSON, TERRY D. |
分类号 |
A61N1/362;F26B5/04;F26B25/06;F27B5/02;F27B5/04;F27B5/14;F27B17/00;F27D11/00;F27D19/00;F27D21/00;H01L21/302;(IPC1-7):F27B17/00 |
主分类号 |
A61N1/362 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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