发明名称 Vacuum oven used in clean room, has vacuum valve which releasably couples hollow oven casing to external vacuum source and door which covers opening of oven casing
摘要 The hollow oven casing (12) accessible through an opening (20), accommodates multiple removable shelves (22) coupled to a heating pad (30). A power interface (32) provided at the end of heating pad, connects the heating pad to an external power source. A vacuum valve (74) releasably couples the oven casing to an external vacuum source and a door (18) covers the opening of hollow casing. Independent claims are also included for the following: (1) method for decontaminating items; and (2) method for operating multiple vacuum ovens.
申请公布号 DE10248506(A1) 申请公布日期 2003.06.26
申请号 DE20021048506 申请日期 2002.10.11
申请人 WEMS, INC. 发明人 VERNIK, DMITRY;DREIKE, CHRISTOPHER B.;WOLFSON, TERRY D.
分类号 A61N1/362;F26B5/04;F26B25/06;F27B5/02;F27B5/04;F27B5/14;F27B17/00;F27D11/00;F27D19/00;F27D21/00;H01L21/302;(IPC1-7):F27B17/00 主分类号 A61N1/362
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