Method of manufacturing full-color organic electro-luminescent device

摘要

A method of manufacturing a full-color organic electro-luminescent device on an indium-tin-oxide glass substrate. A pattern is formed on the indium-tin-oxide glass substrate by the photolithography and the etching process. The indium-tin-oxide glass substrate is cleaned. An insulation pad is formed over the indium-tin-oxide glass substrate. A low shadow mask and a high shadow mask are sequentially formed over the insulation pad by conducting dry film photo-resist processes. A hole-transport layer is formed over the indium-tin-oxide glass substrate by conducting a vapor-depositing process. Three vapor-depositing processes are simultaneously conducted to form red, green and blue light-emitting layers on the hole-transport layer using the low shadow mask and the high shadow mask as a barrier. An electron-transport layer and a metal layer are serially formed over the light-emitting layers by conducting vapor-depositing processes.