| 摘要 |
<p>A thin-film micromachine resonator (resonator) having an improved drive efficiency, a resonator gyroscope having an improved sensitivity to angular velocity, a navigation system using the resonator gyroscope and an automobile are disclosed. The resonator comprises a tuning fork made of a non-piezoelectric material and first and second electrodes provided inside and outside a major surface of an arm of the tuning fork. Third and fourth electrodes are provided on first and second piezoelectric thin films provided on the first and second electrodes. AC voltages of mutually opposite phases are applied to the third and fourth electrodes. The tuning fork resonates, vibrating in the direction perpendicular to the center line. The resonator gyroscope has a sensing part made up of another electrode and another piezoelectric thin film for sensing a Coriolis force corresponding to the angular velocity applied to the resonator.</p> |
