发明名称 Plasma chemical vapor deposition methods and apparatus
摘要 The invention relates to the field of PCVD methods of making an optical fiber and apparatuses for use in PCVD methods. The disclosed methods and apparatuses improve the PCVD process by enhancing the efficiency of the deposition process. The use of the disclosed methods and apparatuses, individually or in combination thereof, will result in at least reducing the time necessary to deposit a predetermined amount of glass on a substrate.
申请公布号 US2003115909(A1) 申请公布日期 2003.06.26
申请号 US20010027282 申请日期 2001.12.21
申请人 HOUSE KEITH L.;KHANNA SAMIR;LANE BARTON G.;MAZUMDER PRANTIK 发明人 HOUSE KEITH L.;KHANNA SAMIR;LANE BARTON G.;MAZUMDER PRANTIK
分类号 C03B37/018;(IPC1-7):C03B37/018 主分类号 C03B37/018
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