VERFAHREN ZUR HERSTELLUNG VON BESCHICHTUNGSDÜSENTEILEN

摘要

A method of preparing a surface on a die coater to improve the uniformity of the coating layer on the substrate. A surface of the die block is machined. The die block is then positioned on a measuring surface in a free state so that the machined surface being measured is substantially vertical. The vertical orientation of the die block substantially removes the effect of gravity on any residual stress during measuring. The steps of machining, positioning, and measuring the die block are repeated until the desired total indicated run-out is achieved. The positioning step may also include interposing at least two point supports between the die block and the measuring surface. In another embodiment, the die blocks are positioned in a reference state or a production state for measuring.