FERROELECTRIC CAPACITOR, METHOD FOR THE PRODUCTION THEREOF AND USE OF THE SAME

摘要

The invention relates to a capacitor comprising a layered structure having at least two electrode layers (3, 4) and a ferroelectric layer (2) consisting of a ferroelectric material and arranged between said electrode layers. At least one of the electrode layers (4) comprises at least one trench (5) for the electrical isolation of at least two partial areas (6, 7) of the electrode layer which are arranged next to each other and define the trench, and the trench comprises an electrical isolating material (11) which is different from the ferroelectric material. The inventive capacitor is characterised in that the trench is defined by the ferroelectric layer. The trench and the isolation material thereof enable the electrode layers to be electrically isolated in a simple and reliable manner. The production of the capacitor can also be simplified in that the isolating material does not need to be arranged on a lateral surface of the capacitor in order to electrically isolate the electrode layers. The capacitor is used as a detector element (20) of a detector array (21) for detecting infrared radiation (22).