发明名称 |
Quartz glass blank used for an optical component for transferring ultraviolet radiation in microlithography e.g. for the production of highly integrated circuits has a glass structure without oxygen defect sites |
摘要 |
Quartz glass blank has a glass structure without oxygen defect sites, a hydrogen content of 3 x 10<17> to 2.0 x 10<18> molecules/cm<3>, a hydroxyl content of 500-1000 wt. ppm, a silicon hydrogen group content of less than 2 x 10<17> molecules/cm<3>, a chlorine content of 60-120 wt. ppm, an inhomogenity in refractive index DELTA n of less than 2 ppm and voltage birefringence of less than 2 nm/cm. Preferred Features: The hydroxyl (OH) content is 600-900, preferably 750-950 wt. ppm. The hydrogen content is 5 x 10<17> to 1.0 x 10<18> molecules/cm<3>. The chlorine content is 80-100 wt. ppm.
|
申请公布号 |
DE10159959(A1) |
申请公布日期 |
2003.06.26 |
申请号 |
DE20011059959 |
申请日期 |
2001.12.06 |
申请人 |
HERAEUS QUARZGLAS GMBH & CO. KG |
发明人 |
UEBBING, BRUNO;KUEHN, BODO |
分类号 |
C03B20/00;C03B19/14;C03C3/06;(IPC1-7):C03C3/06;C03C4/00;G02B1/00 |
主分类号 |
C03B20/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|