PATTERNING OF SOLID STATE FEATURES BY DIRECT WRITE NANOLITHOGRAPHIC PRINTING

摘要

The present invention includes a method of fabricating organic/inorganic composite nanostructures on a substrate comprising depositing a solution having a block copolymer and an inorganic precursor on the substrate using d ip pen nanolithography. The nanostructures comprises arrays of lines and/or dot s having widths/diameters less than 1 micron. The present invention also includes a device comprising an organic/inorganic composite nanoscale region , wherein the nanoscale region has a nanometer scale dimension other than heig ht.