发明名称 |
VAPORISER/DELIVERY VESSEL FOR VOLATILE/THERMALLY SENSITIVE SOLID AND LIQUID COMPOUNDS |
摘要 |
A vaporizer system for vaporizing solid and/or liquid chemical source materials under uniform heating conditions within the vaporizer system, with reduced condensation of vaporized source materials and minimization of "cold spots" within the vaporizer, to provide a substantially continuous flow of vapor to a downstream implantation or deposition (e.g., MOCVD )system. The vaporizer includes a thermally conductive block having a multiplicity of elongated wells formed therein for holding a vapor source material. Within the thermally conductive block is an interior volume communicating with the elongated wells. The thermally conductive block is sealed to form a closed vessel and heat is applied thereto to evenly heat all the elongated wells simultaneously and vaporize the source material therein.
|
申请公布号 |
WO03052160(A1) |
申请公布日期 |
2003.06.26 |
申请号 |
WO2002US37381 |
申请日期 |
2002.11.21 |
申请人 |
ADVANCED TECHNOLOGY MATERIALS, INC. |
发明人 |
DONATUCCI, MATTHEW, B.;WANG, LUPING;MAYER, JAMES |
分类号 |
C23C16/448;H01L21/02;H01L21/265;(IPC1-7):C23C14/24;C23C16/00 |
主分类号 |
C23C16/448 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|