Temperature sensor comprises a temperature sensitive element formed by a platinum thin film resistor as epitaxial layer on a surface of a single crystalline substrate

摘要

Temperature sensor comprises a temperature sensitive element on a surface of a single crystalline substrate. The element is formed by a platinum thin film resistor as epitaxial layer. An Independent claim is also included for a process for the production of a temperature sensor comprising depositing the epitaxial layers by PVD, CVD or MBE. Preferred Features: The single crystalline substrate is made from an electrically conducting material, preferably alpha -Al2O3 or MgO, especially alpha -Al2O3, in which the surface of the substrate is directed parallel to the crystallographic (110)-plane of the alpha -Al2O3. The platinum of the thin film resistor is grown in the (111)-plane, (110)-plane or in the (100)-plane parallel to the surface.