| 摘要 |
PURPOSE: An ultra high-speed spectroscopic ellipsometer is provided to improve productivity and quality of articles, such as semiconductor devices and flat-type image display devices, by furnishing spectroscopic ellipse data within a few milli-minute time periods. CONSTITUTION: An ultra high-speed spectroscopic ellipsometer includes a light source(100) for generating white light. A first collimation section(200) receives white light from the light source(100). White light introduced into the first collimation section(200) is incident into a polarization state generator, which polarizes white light. Then, polarized light is incident into a sample(110). The sample(110) reflects polarized light by converting a polarization state of polarized light. Polarized light reflected from the sample(110) is incident into a second collimation section, which converts polarized light into parallel light. A DOAP(400) is provided to polarize parallel light in a stokes vector state. A spectrograph/PDA(500) is provided to measure a quantity of polarized light. |
