发明名称 |
CYLINDRICAL TARGET AND METHOD OF MANUFACTURING THE CYLINDRICAL TARGET |
摘要 |
A cylindrical target is obtained by joining a backing tube made of metal as an inner cylinder and a target material as an outer cylinder via a buffer member 52 such as a carbon felt. The cylindrical target broadens the possibility of selecting the target material and the material for a backing tube for supporting this, simplifies manufacturing and enables recycling. <IMAGE>
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申请公布号 |
EP1321537(A1) |
申请公布日期 |
2003.06.25 |
申请号 |
EP20010963449 |
申请日期 |
2001.09.05 |
申请人 |
ASAHI GLASS COMPANY LTD. |
发明人 |
UEDA, HIROSHI;KAMIYAMA, TOSHIHISA;KANDA, KOUICHI |
分类号 |
C23C14/10;C23C14/34;H01J37/34;(IPC1-7):C23C14/34 |
主分类号 |
C23C14/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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