发明名称 ELECTROLYTIC PLATING METHOD
摘要 PURPOSE: To provide an electrolytic plating method particularly suitable for filling a via. CONSTITUTION: The electrolytic metal plating method is characterized by applying a current with periods consisting of a regular electrolysis time of 1-50 msec, a reverse electrolysis time of 0.2-5 msec, and a downtime of 0.1-20 msec.
申请公布号 KR20030051325(A) 申请公布日期 2003.06.25
申请号 KR20020080099 申请日期 2002.12.16
申请人 SHIPLEY COMPANY, L.L.C 发明人 KUSAKA MASARU;TSUCHIDA HIDEKI
分类号 C25D3/38;C25D5/00;C25D5/18;C25D7/00;C25D7/12;H01L21/288;H05K3/42;(IPC1-7):C25D5/00 主分类号 C25D3/38
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