| 摘要 |
PURPOSE: A mass flow measuring sensor of a mass flow controller is provided to precisely and sensitively measure a mass flow with a rapid response time by forming a test sample flowing pipe in an annular shape. CONSTITUTION: A mass flow measuring sensor(120) includes a test sample flowing pipe(121) forming a fluid path for a sample fluid and a heat source for heating the sample fluid flowing through the test sample flowing pipe(121). A first temperature detecting device is provided to detect a temperature of the sample fluid at an upstream of the sample fluid. The first temperature detecting device generates an electric signal regarding the temperature of the sample fluid. A second temperature detecting device is provided to detect a temperature of the sample fluid at a downstream of the sample fluid and generate an electric signal corresponding to the temperature of the sample fluid. The fluid path includes a flowing region and a non-flowing region. The non-flowing region is formed at a center of the fluid path and the flowing region surrounds the non-flowing region.
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