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发明名称
Semiconductor fabrication method
摘要
申请公布号
GB2341278(B)
申请公布日期
2003.06.25
申请号
GB19990028259
申请日期
1999.04.01
申请人
* ZETEX PLC
发明人
DAVID NEIL * CASEY
分类号
H01L21/285;H01L21/768;H01L29/06;H01L29/40;H01L29/78;(IPC1-7):H01L21/285
主分类号
H01L21/285
代理机构
代理人
主权项
地址
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