INDEX DEVICE FOR SEMICONDUCTOR DEVICE TEST HANDLER

摘要

PURPOSE: An index device for semiconductor device test handler is provided to perform smoothly a low temperature test as well as a high temperature test by maintaining a state of low temperature of a semiconductor device. CONSTITUTION: A cooling fluid supply tube(2) supplies cooling fluid to a base plate(4). A plurality of inductive grooves(41) are used for inducing the cooling fluid of the cooling fluid supply tube to each pickup member(5). A plurality of injection holes(42) are formed at end portions of the inductive grooves. A plurality of cooling fins(55) are installed at each pickup member and cooled by the cooling fluid. A heat transfer column is used for performing the heat transferring process between the semiconductor device and the cooling fins. A plurality of exhaust holes(43) are formed between each upper face of the pickup members and the base plate in order to exhaust the cooling fluid. A cooling fluid control portion controls the amount of the cooling fluid.