发明名称 APPARATUS FOR DETECTING CIRCULATION OF WATER OF CONSTANT TEMPERATURE
摘要 PURPOSE: An apparatus for detecting the circulation of water of a constant temperature is provided to extend the lifetime of a circulation pump and prevent the circulation pump from being broken by detecting when the constant temperature water is not circulated and by stopping the operation of the circulation pump. CONSTITUTION: Developer is supplied to a supply pipe(21). A water jacket(26) makes the developer passing through the supply pipe exchange heat with the constant temperature water supplied through the circulation pipe(28a,28b,28c) to maintain a constant temperature of the developer, connected to the circulation pipe through which the constant temperature water passes. The circulation pump(22) pumps to supply the constant temperature water from the water jacket through the supply pipe. A circulation sensor detects the circulation state of the constant temperature water, installed in the circulation pipe to which the constant temperature water is supplied. A controller(32) controls to stop the pumping operation of the circulation pump when the circulation sensor detects that the constant temperature water is not circulated.
申请公布号 KR20030049068(A) 申请公布日期 2003.06.25
申请号 KR20010079162 申请日期 2001.12.14
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 RYU, HYEONG SIK
分类号 H01L21/02;(IPC1-7):H01L21/02 主分类号 H01L21/02
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