PROBE HOLDER SUPPORTING APPARATUS OF EDS EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PURPOSE: A probe holder supporting apparatus of an EDS equipment for manufacturing semiconductor device is provided to be capable of exactly and reliably locating a probe holder and conserving the location of the probe holder for a long time by using a stiff ball having durability and abrasion resistance. CONSTITUTION: A probe card is loaded on the center portion of a probe holder(30), wherein the probe holder includes a plurality of through holes and guide pins(34a). The rear portion of the probe holder is supported by a tray having support pins corresponding to the through holes of the probe holder. A head plate(36) is located opposite to the upper portion of the probe holder, wherein the head plate includes grooves(38) corresponding to the guide pins of the probe holder. Preferably, the guide pin includes a stiff ball(40) made of ceramic on the tip portion.